[Information] Vacuum Concentrated Exhaust System 'VIE-system'
Vacuum exhaust energy-saving solutions! Application to vacuum facilities in semiconductor device factories.
This document is an introduction to the vacuum centralized exhaust system 'VIE-system' handled by Beck. It includes the current issues with exhaust systems, an introduction to the vacuum centralized exhaust system, and the effects of implementing the VIE-system. Please feel free to download and take a look. 【Contents】 ■ Current exhaust system for the load lock chamber ■ Current exhaust system for the load lock chamber (example) ■ Vacuum centralized exhaust system for the load lock chamber ■ Effects of implementing the VIE-system *For more details, please refer to the PDF document or feel free to contact us.
- Company:ベック
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